NXaberration¶
Status:
base class, extends NXobject
Description:
Models for aberrations of electro-magnetic lenses in electron microscopy.
The notation follows O. Krivanek et al. (1999) and O. Krivanek et al. (2003) See also S. J. Pennycock and P. D. Nellist (page 44ff, and page 118ff) for further details, additional literature, and the unit of the coefficients. Consult Table 7-2 of Ibid. publication on how to convert between conventions of different groups/vendors.
Symbols:
No symbol table
- Groups cited:
none
Structure:
c_1_0: (optional) NX_FLOAT {units=NX_LENGTH}
Defocus
c_1_2_a: (optional) NX_FLOAT {units=NX_LENGTH}
Two-fold astigmatism
c_1_2_b: (optional) NX_FLOAT {units=NX_LENGTH}
Two-fold astigmatism
c_2_1_a: (optional) NX_FLOAT {units=NX_LENGTH}
Second-order axial coma
c_2_1_b: (optional) NX_FLOAT {units=NX_LENGTH}
Second-order axial coma
c_2_3_a: (optional) NX_FLOAT {units=NX_LENGTH}
Threefold astigmatism
c_2_3_b: (optional) NX_FLOAT {units=NX_LENGTH}
Threefold astigmatism
c_3_0: (optional) NX_FLOAT {units=NX_LENGTH}
Spherical aberration
c_3_2_a: (optional) NX_FLOAT {units=NX_LENGTH}
Star aberration
c_3_2_b: (optional) NX_FLOAT {units=NX_LENGTH}
Star aberration
c_3_4_a: (optional) NX_FLOAT {units=NX_LENGTH}
Fourfold astigmatism
c_3_4_b: (optional) NX_FLOAT {units=NX_LENGTH}
Fourfold astigmatism
c_5_0: (optional) NX_FLOAT {units=NX_LENGTH}
Fifth-order spherical aberration
Hypertext Anchors¶
List of hypertext anchors for all groups, fields, attributes, and links defined in this class.
