.. auto-generated by dev_tools.docs.nxdl from the NXDL source contributed_definitions/NXellipsometry.nxdl.xml -- DO NOT EDIT
.. index::
! NXellipsometry (application definition)
! ellipsometry (application definition)
see: ellipsometry (application definition); NXellipsometry
.. _NXellipsometry:
==============
NXellipsometry
==============
**Status**:
application definition, extends :ref:`NXobject`
**Description**:
Ellipsometry, complex systems, up to variable angle spectroscopy.
Information on ellipsometry is provided, e.g. in:
* H. Fujiwara, Spectroscopic ellipsometry: principles and applications,
John Wiley & Sons, 2007.
* R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light,
North-Holland Publishing Company, 1977.
* H. G. Tompkins and E. A. Irene, Handbook of Ellipsometry,
William Andrew, 2005.
Open access sources:
* https://www.angstromadvanced.com/resource.asp
* https://pypolar.readthedocs.io/en/latest/
Review articles:
* T. E. Jenkins, "Multiple-angle-of-incidence ellipsometry",
J. Phys. D: Appl. Phys. 32, R45 (1999),
https://doi.org/10.1088/0022-3727/32/9/201
* D. E. Aspnes, "Spectroscopic ellipsometry - Past, present, and future",
Thin Solid Films 571, 334-344 (2014),
https://doi.org/10.1016/j.tsf.2014.03.056
* R. M. A. Azzam, "Mueller-matrix ellipsometry: a review",
Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing,
(3 October 1997),
https://doi.org/10.1117/12.283870
* E. A. Irene, "Applications of spectroscopic ellipsometry to microelectronics",
Thin Solid Films 233, 96-111 (1993),
https://doi.org/10.1016/0040-6090(93)90069-2
* S. Zollner et al., "Spectroscopic ellipsometry from 10 to 700 K",
Adv. Opt. Techn., (2022),
https://doi.org/10.1515/aot-2022-0016
**Symbols**:
Variables used throughout the document, e.g. dimensions and important
parameters
**N_wavelength**: Size of the energy or wavelength vector used, the length of NXinstrument/spectrometer/wavelength array
**N_variables**: How many variables are saved in a measurement. e.g. 2 for Psi and Delta, 16 for Mueller matrix elements, 15 for normalized Mueller matrix, 3 for NCS, the length of NXsample/column_names
**N_angles**: Number of incident angles used, the length of NXinstrument/angle_of_incidence array
**N_p1**: Number of sample parameters scanned, if you varied any of the parameters such as temperature, pressure, or pH, the maximal length of the arrays specified by NXsample/environment_conditions/SENSOR/value if it exists.
**N_time**: Number of time points measured, the length of NXsample/time_points
**Groups cited**:
:ref:`NXaperture`, :ref:`NXdata`, :ref:`NXdetector`, :ref:`NXentry`, :ref:`NXenvironment`, :ref:`NXgrating`, :ref:`NXinstrument`, :ref:`NXmonochromator`, :ref:`NXprocess`, :ref:`NXsample`, :ref:`NXsensor`, :ref:`NXslit`, :ref:`NXsource`, :ref:`NXsubentry`, :ref:`NXtransformations`, :ref:`NXuser`
.. index:: NXentry (base class); used in application definition, NXprocess (base class); used in application definition, NXuser (base class); used in application definition, NXinstrument (base class); used in application definition, NXsource (base class); used in application definition, NXsubentry (base class); used in application definition, NXtransformations (base class); used in application definition, NXaperture (base class); used in application definition, NXdetector (base class); used in application definition, NXmonochromator (base class); used in application definition, NXgrating (base class); used in application definition, NXslit (base class); used in application definition, NXsample (base class); used in application definition, NXenvironment (base class); used in application definition, NXsensor (base class); used in application definition, NXdata (base class); used in application definition
**Structure**:
.. _/NXellipsometry/ENTRY-group:
**ENTRY**: (required) :ref:`NXentry`
This is the application definition describing ellipsometry experiments.
Such experiments may be as simple as identifying how a reflected
beam of light with a single wavelength changes its polarization state,
to a variable angle spectroscopic ellipsometry experiment.
The application definition defines:
* elements of the experimental instrument
* calibration information if available
* parameters used to tune the state of the sample
* sample description
.. _/NXellipsometry/ENTRY/definition-field:
.. index:: definition (field)
**definition**: (required) :ref:`NX_CHAR <NX_CHAR>`
An application definition for ellipsometry.
Obligatory value: ``NXellipsometry``
.. _/NXellipsometry/ENTRY/definition@version-attribute:
.. index:: version (field attribute)
**@version**: (required) :ref:`NX_CHAR <NX_CHAR>`
Version number to identify which definition of this application definition was
used for this entry/data.
.. _/NXellipsometry/ENTRY/definition@url-attribute:
.. index:: url (field attribute)
**@url**: (required) :ref:`NX_CHAR <NX_CHAR>`
URL where to find further material (documentation, examples) relevant to the
application definition
.. _/NXellipsometry/ENTRY/experiment_identifier-field:
.. index:: experiment_identifier (field)
**experiment_identifier**: (required) :ref:`NX_CHAR <NX_CHAR>`
Unique identifier of the experiment, such as a (globally persistent) unique
identifier.
i) The identifier is usually defined by the facility or principle investigator.
ii) The identifier enables to link experiments to e.g. proposals.
.. _/NXellipsometry/ENTRY/experiment_description-field:
.. index:: experiment_description (field)
**experiment_description**: (recommended) :ref:`NX_CHAR <NX_CHAR>`
A free-text description of the experiment. What is the aim of the experiment?
The general procedure.
.. _/NXellipsometry/ENTRY/start_time-field:
.. index:: start_time (field)
**start_time**: (required) :ref:`NX_DATE_TIME <NX_DATE_TIME>`
Start time of the experiment. UTC offset should be specified.
.. _/NXellipsometry/ENTRY/acquisition_program-group:
**acquisition_program**: (optional) :ref:`NXprocess`
.. _/NXellipsometry/ENTRY/acquisition_program@url-attribute:
.. index:: url (group attribute)
**@url**: (required) :ref:`NX_CHAR <NX_CHAR>`
Website of the software.
.. _/NXellipsometry/ENTRY/acquisition_program/program-field:
.. index:: program (field)
**program**: (required) :ref:`NX_CHAR <NX_CHAR>`
Commercial or otherwise defined given name to the program that was used to
generate the result file(s) with measured data and metadata. This program
converts the measured signals to ellipsometry data. If home written, one can
provide the actual steps in the NOTE subfield here.
.. _/NXellipsometry/ENTRY/acquisition_program/version-field:
.. index:: version (field)
**version**: (required) :ref:`NX_CHAR <NX_CHAR>`
Either version with build number, commit hash, or description of a (online)
repository where the source code of the program and build instructions can be
found so that the program can be configured in such a way that result files can
be created ideally in a deterministic manner.
.. _/NXellipsometry/ENTRY/USER-group:
**USER**: (required) :ref:`NXuser`
Contact information of at least the user of the instrument or the investigator
who performed this experiment. Adding multiple users if relevant is recommended.
.. _/NXellipsometry/ENTRY/USER/name-field:
.. index:: name (field)
**name**: (required) :ref:`NX_CHAR <NX_CHAR>`
Name of the user.
.. _/NXellipsometry/ENTRY/USER/affiliation-field:
.. index:: affiliation (field)
**affiliation**: (required) :ref:`NX_CHAR <NX_CHAR>`
Name of the affiliation of the user at the point in time when the experiment was
performed.
.. _/NXellipsometry/ENTRY/USER/address-field:
.. index:: address (field)
**address**: (required) :ref:`NX_CHAR <NX_CHAR>`
Full address (street, street number, ZIP, city, country) of the user's
affiliation.
.. _/NXellipsometry/ENTRY/USER/email-field:
.. index:: email (field)
**email**: (required) :ref:`NX_CHAR <NX_CHAR>`
Email address of the user.
.. _/NXellipsometry/ENTRY/USER/orcid-field:
.. index:: orcid (field)
**orcid**: (recommended) :ref:`NX_CHAR <NX_CHAR>`
Author ID defined by https://orcid.org/.
.. _/NXellipsometry/ENTRY/USER/telephone_number-field:
.. index:: telephone_number (field)
**telephone_number**: (recommended) :ref:`NX_CHAR <NX_CHAR>`
Official telephone number of the user.
.. _/NXellipsometry/ENTRY/INSTRUMENT-group:
**INSTRUMENT**: (required) :ref:`NXinstrument`
General properties of the ellipsometry equipment
.. _/NXellipsometry/ENTRY/INSTRUMENT/model-field:
.. index:: model (field)
**model**: (required) :ref:`NX_CHAR <NX_CHAR>`
The name of the instrument
.. _/NXellipsometry/ENTRY/INSTRUMENT/model@version-attribute:
.. index:: version (field attribute)
**@version**: (required) :ref:`NX_CHAR <NX_CHAR>`
The used version of the hardware if available. If not a commercial instrument
use date of completion of the hardware.
.. _/NXellipsometry/ENTRY/INSTRUMENT/company-field:
.. index:: company (field)
**company**: (optional) :ref:`NX_CHAR <NX_CHAR>`
Name of the company which build the instrument
.. _/NXellipsometry/ENTRY/INSTRUMENT/construction_year-field:
.. index:: construction_year (field)
**construction_year**: (optional) :ref:`NX_DATE_TIME <NX_DATE_TIME>`
ISO8601 date when the instrument was constructed. UTC offset should be
specified.
.. _/NXellipsometry/ENTRY/INSTRUMENT/firmware-field:
.. index:: firmware (field)
**firmware**: (required) :ref:`NX_CHAR <NX_CHAR>`
Commercial or otherwise defined name of the software that was used for the
measurement
.. _/NXellipsometry/ENTRY/INSTRUMENT/firmware@version-attribute:
.. index:: version (field attribute)
**@version**: (required) :ref:`NX_CHAR <NX_CHAR>`
Version and build number or commit hash of the software source code
.. _/NXellipsometry/ENTRY/INSTRUMENT/firmware@url-attribute:
.. index:: url (field attribute)
**@url**: (required) :ref:`NX_CHAR <NX_CHAR>`
Website of the software.
.. _/NXellipsometry/ENTRY/INSTRUMENT/focussing_probes-field:
.. index:: focussing_probes (field)
**focussing_probes**: (required) :ref:`NX_BOOLEAN <NX_BOOLEAN>`
Were focussing probes (lenses) used?
.. _/NXellipsometry/ENTRY/INSTRUMENT/data_correction-field:
.. index:: data_correction (field)
**data_correction**: (optional) :ref:`NX_BOOLEAN <NX_BOOLEAN>`
Were the recorded data corrected by the window effects of the lenses?
.. _/NXellipsometry/ENTRY/INSTRUMENT/angular_spread-field:
.. index:: angular_spread (field)
**angular_spread**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_ANGLE <NX_ANGLE>`}
Specify the angular spread caused by the focussing probes
.. _/NXellipsometry/ENTRY/INSTRUMENT/ellipsometry_type-field:
.. index:: ellipsometry_type (field)
**ellipsometry_type**: (required) :ref:`NX_CHAR <NX_CHAR>`
What type of ellipsometry was used? See Fujiwara Table 4.2
Any of these values:
* ``rotating analyzer``
* ``rotating analyzer with analyzer compensator``
* ``rotating analyzer with polarizer compensator``
* ``rotating polarizer``
* ``rotating compensator on polarizer side``
* ``rotating compensator on analyzer side``
* ``modulator on polarizer side``
* ``modulator on analyzer side``
* ``dual compensator``
* ``phase modulation``
* ``imaging ellipsometry``
* ``null ellipsometry``
.. _/NXellipsometry/ENTRY/INSTRUMENT/calibration_status-field:
.. index:: calibration_status (field)
**calibration_status**: (required) :ref:`NX_CHAR <NX_CHAR>`
Was a calibration performed? If yes, when was it done? If the calibration time
is provided, it should be specified in calibration/calibration_time.
Any of these values:
* ``calibration time provided``
* ``no calibration``
* ``within 1 hour``
* ``within 1 day``
* ``within 1 week``
.. _/NXellipsometry/ENTRY/INSTRUMENT/angle_of_incidence-field:
.. index:: angle_of_incidence (field)
**angle_of_incidence**: (required) :ref:`NX_NUMBER <NX_NUMBER>` (Rank: 1, Dimensions: [N_angles]) {units=\ :ref:`NX_ANGLE <NX_ANGLE>`}
Incident angle of the beam vs. the normal of the bottom reflective (substrate)
surface in the sample
.. _/NXellipsometry/ENTRY/INSTRUMENT/light_source-group:
**light_source**: (required) :ref:`NXsource`
Specify the used light source. Multiple selection possible.
.. _/NXellipsometry/ENTRY/INSTRUMENT/calibration-group:
**calibration**: (recommended) :ref:`NXsubentry`
Ellipsometers require regular calibration to adjust the hardware parameters for
proper zero values and background light compensation.
.. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_time-field:
.. index:: calibration_time (field)
**calibration_time**: (optional) :ref:`NX_DATE_TIME <NX_DATE_TIME>`
If calibtration status is 'calibration time provided', specify the ISO8601 date
when calibration was last performed before this measurement. UTC offset should
be specified.
.. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_sample-field:
.. index:: calibration_sample (field)
**calibration_sample**: (required) :ref:`NX_CHAR <NX_CHAR>`
Free-text to describe which sample was used for calibration, e.g. silicon wafer
with 25 nm thermal oxide layer.
.. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data-group:
**calibration_data**: (required) :ref:`NXsubentry`
Arrays which provide the measured calibration data. Multiple sets are possible,
e.g. Psi and delta measured on a e.g. silicon calibration wafer, and the
straight-through data. We recommend to provide data that is measured under the
same settings as the measurement was performed, that is if Psi and Delta are
measured for your data, also provide Psi and Delta here and use the same
wavelenghts as for the measured data.
.. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_data_type-field:
.. index:: calibration_data_type (field)
**calibration_data_type**: (required) :ref:`NX_CHAR <NX_CHAR>`
What data were recorded for the calibration? The number of variables
(N_variables) have to be set to the number of provided data columns accordingly,
e.g. psi/delta -> N_variables = 2, Jones vector -> N_variables = 4, Mueller
martix -> N_variables = 16, etc.
Any of these values:
* ``psi/delta``
* ``tan(psi)/cos(delta)``
* ``Jones matrix``
* ``Mueller matrix``
* ``not provided``
.. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_angle_of_incidence-field:
.. index:: calibration_angle_of_incidence (field)
**calibration_angle_of_incidence**: (required) :ref:`NX_NUMBER <NX_NUMBER>` (Rank: 1, Dimensions: [N_calibration_angles]) {units=\ :ref:`NX_ANGLE <NX_ANGLE>`}
Angle(s) of incidence used during the calibration measurement (excluding
straight through mode)
.. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_wavelength-field:
.. index:: calibration_wavelength (field)
**calibration_wavelength**: (required) :ref:`NX_NUMBER <NX_NUMBER>` (Rank: 1, Dimensions: [N_calibration_wavelength])
The wavelength or equivalent values (which are inter-convertible).
The importer should convert all to one unit, and make the others
accessible. Historically, energy is used in eV, but for visible
spectroscopy wavelength is more common, for IR wave numbers in
1/cm units.
Possibly use the same type of data as for the measurement.
.. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_data-field:
.. index:: calibration_data (field)
**calibration_data**: (required) :ref:`NX_NUMBER <NX_NUMBER>` (Rank: 3, Dimensions: [N_calibration_angles+1, N_variables, N_calibration_wavelength]) {units=\ :ref:`NX_UNITLESS <NX_UNITLESS>`}
Calibration is performed on a reference surface (usually a silicon wafer with a
well defined oxide layer) at a number of angles of incidence and in a straight
through mode (transmission in air).
.. _/NXellipsometry/ENTRY/INSTRUMENT/stage-group:
**stage**: (required) :ref:`NXsubentry`
Sample stage, holding the sample at a specific position in X,Y,Z (Cartesian)
coordinate system and at an orientation defined by three Euler angles (alpha,
beta, gamma). The stage may be motorized or manual, special for liquids or gas
environment.
.. _/NXellipsometry/ENTRY/INSTRUMENT/stage/stage_type-field:
.. index:: stage_type (field)
**stage_type**: (required) :ref:`NX_CHAR <NX_CHAR>`
Specify what type of stage was used.
Any of these values:
* ``manual stage``
* ``scanning stage``
* ``liquid stage``
* ``gas cell``
* ``cryostat``
.. _/NXellipsometry/ENTRY/INSTRUMENT/stage/description-field:
.. index:: description (field)
**description**: (recommended) :ref:`NX_CHAR <NX_CHAR>`
A free-text field to provide information about the stage.
.. _/NXellipsometry/ENTRY/INSTRUMENT/stage/TRANSFORMATIONS-group:
**TRANSFORMATIONS**: (recommended) :ref:`NXtransformations`
The stage coordinate system vs. the incident beam. The Z-axis of the stage is considered to point along the normal of the substrate (bottom reflecting surface) from the stage towards the general direction of the light source. The beam comes with the angle of incidence towards this Z-axis, but in opposite direction, thus they are connected with a rotation of 180 - angle of incidence (in degrees).
This transformation brings us from the NEXUS coordinates to the stage coordinates.
Then provide the set of translations (if there are any). These all have a vector defining their relative direction in the current coordinate system. (This current coordinate system changes with every transformation if you set the parameter 'depends' to the name of the previous step.)
Last, provide the rotations of the sample
.. _/NXellipsometry/ENTRY/INSTRUMENT/stage/TRANSFORMATIONS/alternative-field:
.. index:: alternative (field)
**alternative**: (optional) :ref:`NX_CHAR <NX_CHAR>`
If there is no motorized stage, we should at least qualify where the beam hits
the sample and in what direction the sample stands in a free-text description,
e.g. 'center of sample, long edge parallel to plane of incidence'.
.. _/NXellipsometry/ENTRY/INSTRUMENT/window-group:
**window**: (optional) :ref:`NXaperture`
For environmental measurements, the environment (liquid, vapor, vacuum etc.) is
enclosed in a cell or cryostat, which has windows both in the direction of the
source and the detector (looking from the sample). These windows also add a
phase shift to the light altering the measured signal. This shift has to be
corrected based on measuring a known sample in the environmental cell.
.. _/NXellipsometry/ENTRY/INSTRUMENT/window/material-field:
.. index:: material (field)
**material**: (required) :ref:`NX_CHAR <NX_CHAR>`
The material of the window
Any of these values:
* ``quartz``
* ``diamond``
* ``calcium fluoride``
* ``zinc selenide``
* ``thallium bromoiodide``
* ``alkali halide compound``
* ``Mylar``
* ``other``
.. _/NXellipsometry/ENTRY/INSTRUMENT/window/other_material-field:
.. index:: other_material (field)
**other_material**: (optional) :ref:`NX_CHAR <NX_CHAR>`
If you specified 'other' as window material, decsribe here what it is.
.. _/NXellipsometry/ENTRY/INSTRUMENT/window/thickness-field:
.. index:: thickness (field)
**thickness**: (required) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_LENGTH <NX_LENGTH>`}
Thickness of the window
.. _/NXellipsometry/ENTRY/INSTRUMENT/window/orientation_angle-field:
.. index:: orientation_angle (field)
**orientation_angle**: (required) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_ANGLE <NX_ANGLE>`}
Angle of the window normal (outer) vs. the substrate normal (similar to the
angle of incidence).
.. _/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data-group:
**reference_data**: (required) :ref:`NXsubentry`
Recorded data that can be used to calculate the window effect. Typically this is
the substrate (e.g. silicon with thermal oxide layer) in air without window and
in a known medium with the window.
.. _/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/reference_sample-field:
.. index:: reference_sample (field)
**reference_sample**: (required) :ref:`NX_CHAR <NX_CHAR>`
What sample was used to estimate the window effect?
.. _/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/reference_wavelength-field:
.. index:: reference_wavelength (field)
**reference_wavelength**: (required) :ref:`NX_NUMBER <NX_NUMBER>` (Rank: 1, Dimensions: [N_wavelength]) {units=\ :ref:`NX_LENGTH <NX_LENGTH>`}
Wavelength of the reference data. Use the same wavelengths at which all other
measurements are recorded
.. _/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/data-field:
.. index:: data (field)
**data**: (recommended) :ref:`NX_NUMBER <NX_NUMBER>` (Rank: 4, Dimensions: [2, N_angles, N_variables, N_wavelength]) {units=\ :ref:`NX_UNITLESS <NX_UNITLESS>`}
Recorded data of a reference surface with and without window/medium.
.. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR-group:
**DETECTOR**: (required) :ref:`NXdetector`
Which type of detector was used, and what is known about it? A detector can be a
photomultiplier (PMT), a CCD in a camera, or an array in a spectrometer. If so,
the whole detector unit goes in here. Integration time is the count time field,
or the real time field. See their definition.
.. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/detector_type-field:
.. index:: detector_type (field)
**detector_type**: (required) :ref:`NX_CHAR <NX_CHAR>`
What kind of detector module is used, e.g. CCD-spectrometer, CCD camera, PMT,
photodiode, etc.
Any of these values:
* ``PMT``
* ``photodiode``
* ``avalanche diode``
* ``CCD camera``
* ``CCD spectrometer``
* ``other``
.. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/other_detector-field:
.. index:: other_detector (field)
**other_detector**: (optional) :ref:`NX_CHAR <NX_CHAR>`
If you specified 'other' as detector type, please write down what it is.
.. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/revolution-field:
.. index:: revolution (field)
**revolution**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_ANY <NX_ANY>`}
Define how many rotations of the rotating element were taken into account per
spectrum.
.. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/rotating_element-field:
.. index:: rotating_element (field)
**rotating_element**: (required) :ref:`NX_CHAR <NX_CHAR>`
Define which element rotates, e.g. polarizer or analyzer.
Any of these values:
* ``polarizer (source side)``
* ``analyzer (detector side)``
* ``compensator (source side)``
* ``compensator (detector side)``
.. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/fixed_revolution-field:
.. index:: fixed_revolution (field)
**fixed_revolution**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_FREQUENCY <NX_FREQUENCY>`}
Rotation rate, if the revolution does not change during the measurement.
.. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/variable_revolution-field:
.. index:: variable_revolution (field)
**variable_revolution**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` (Rank: 1, Dimensions: [2])
Specify maximum and minimum values for the revolution.
.. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/intensity_threshold-field:
.. index:: intensity_threshold (field)
**intensity_threshold**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_UNITLESS <NX_UNITLESS>`}
Minimum signal for which dynamic averaging is performed.
.. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/min_intensity-field:
.. index:: min_intensity (field)
**min_intensity**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_UNITLESS <NX_UNITLESS>`}
Value for the minimum intensity chosen. Data points below this value might be
skipped by the instrument
.. _/NXellipsometry/ENTRY/INSTRUMENT/spectrometer-group:
**spectrometer**: (required) :ref:`NXmonochromator`
The spectroscope element of the ellipsometer before the detector, but often
integrated to form one closed unit. Information on the dispersive element can be
specified in the subfield GRATING. Note that different gratings might be used
for different wavelength ranges. The dispersion of the grating for each
wavelength range can be stored in grating_dispersion.
.. _/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/wavelength-field:
.. index:: wavelength (field)
**wavelength**: (required) :ref:`NX_NUMBER <NX_NUMBER>` (Rank: 1, Dimensions: [N_wavelength]) {units=\ :ref:`NX_LENGTH <NX_LENGTH>`}
Wavelength value(s) used for the measurement. An array of 1 or more elements.
Length defines N_wavelength
.. _/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/spectral_resolution-field:
.. index:: spectral_resolution (field)
**spectral_resolution**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_WAVENUMBER <NX_WAVENUMBER>`}
Spectral resolution of the instrument.
.. _/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/GRATING-group:
**GRATING**: (optional) :ref:`NXgrating`
Diffraction grating, as could be used in a monochromator. If two or more
gratings were used, define the angular dispersion and the wavelength range
(min/max wavelength) for each grating and make sure that the wavelength ranges
do not overlap. The dispersion should be defined for the entire wavelength range
of the experiment.
.. _/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/GRATING/angular_dispersion-field:
.. index:: angular_dispersion (field)
**angular_dispersion**: (optional) :ref:`NX_NUMBER <NX_NUMBER>`
Dispersion of the grating in nm/mm used.
.. _/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/GRATING/grating_wavelength_min-field:
.. index:: grating_wavelength_min (field)
**grating_wavelength_min**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_LENGTH <NX_LENGTH>`}
Minimum wavelength of the grating.
.. _/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/GRATING/grating_wavelength_max-field:
.. index:: grating_wavelength_max (field)
**grating_wavelength_max**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_LENGTH <NX_LENGTH>`}
Maximum wavelength of the grating.
.. _/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/SLIT-group:
**SLIT**: (optional) :ref:`NXslit`
Define the width of the monochromator slit in the subfield x_gap.
.. _/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/SLIT/fixed_slit-field:
.. index:: fixed_slit (field)
**fixed_slit**: (optional) :ref:`NX_BOOLEAN <NX_BOOLEAN>`
Was the slit width fixed?
.. _/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/SLIT/max_gap-field:
.. index:: max_gap (field)
**max_gap**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_LENGTH <NX_LENGTH>`}
If slit width was not fixed, define the maximum slit width.
.. _/NXellipsometry/ENTRY/SAMPLE-group:
**SAMPLE**: (required) :ref:`NXsample`
Properties of the sample, its history, the sample environment and experimental
conditions (e.g. surrounding medium, temperature, pressure etc.), along with the
data (data type, wavelength array, measured data).
.. _/NXellipsometry/ENTRY/SAMPLE/atom_types-field:
.. index:: atom_types (field)
**atom_types**: (required) :ref:`NX_CHAR <NX_CHAR>`
List of comma-separated elements from the periodic table
that are contained in the sample.
If the sample substance has multiple components, all
elements from each component must be included in `atom_types`.
.. _/NXellipsometry/ENTRY/SAMPLE/sample_name-field:
.. index:: sample_name (field)
**sample_name**: (required) :ref:`NX_CHAR <NX_CHAR>`
Descriptive name of the sample
.. _/NXellipsometry/ENTRY/SAMPLE/sample_history-field:
.. index:: sample_history (field)
**sample_history**: (required) :ref:`NX_CHAR <NX_CHAR>`
Ideally, a reference to the location or a unique (globally persistent)
identifier (e.g.) of e.g. another file which gives as many as possible details
of the material, its microstructure, and its thermo-chemo-mechanical
processing/preparation history. In the case that such a detailed history of the
sample is not available, use this field as a free-text description to specify
details of the sample and its preparation.
.. _/NXellipsometry/ENTRY/SAMPLE/preparation_date-field:
.. index:: preparation_date (field)
**preparation_date**: (recommended) :ref:`NX_DATE_TIME <NX_DATE_TIME>`
ISO8601 date with time zone (UTC offset) specified.
.. _/NXellipsometry/ENTRY/SAMPLE/layer_structure-field:
.. index:: layer_structure (field)
**layer_structure**: (required) :ref:`NX_CHAR <NX_CHAR>`
Qualitative description of the layer structure for the sample. For example:
Si/native oxide/thermal oxide/polymer/peptide
.. _/NXellipsometry/ENTRY/SAMPLE/data_identifier-field:
.. index:: data_identifier (field)
**data_identifier**: (required) :ref:`NX_NUMBER <NX_NUMBER>`
An identifier to correlate data to the experimental conditions, if several were
used in this measurement; typically an index of 0 - N
.. _/NXellipsometry/ENTRY/SAMPLE/data_type-field:
.. index:: data_type (field)
**data_type**: (required) :ref:`NX_CHAR <NX_CHAR>`
Select which type of data was recorded, for example Psi and Delta (see:
https://en.wikipedia.org/wiki/Ellipsometry#Data_acquisition). It is possible to
have multiple selections. Data types may also be converted to each other, e.g. a
Mueller matrix contains N,C,S data as well. This selection defines how many
columns (N_variables) are stored in the data array.
Any of these values:
* ``psi/delta``
* ``tan(psi)/cos(delta)``
* ``Mueller matrix``
* ``Jones matrix``
* ``N/C/S``
* ``raw data``
.. _/NXellipsometry/ENTRY/SAMPLE/column_names-field:
.. index:: column_names (field)
**column_names**: (required) :ref:`NX_CHAR <NX_CHAR>` (Rank: 1, Dimensions: [N_variables])
Please list in this array the column names used in your actual data. That is
['psi', 'delta'] or ['MM1', 'MM2', 'MM3', ..., 'MM16] for a full Mueller matrix,
etc.
.. _/NXellipsometry/ENTRY/SAMPLE/measured_data-field:
.. index:: measured_data (field)
**measured_data**: (required) :ref:`NX_NUMBER <NX_NUMBER>` (Rank: 5, Dimensions: [N_time, N_p1, N_angles, N_variables, N_wavelength])
Resulting data from the measurement, described by data type. Minimum two columns
containing Psi and Delta, or for the normalized Mueller matrix it may be 16 (or
15 if the element (1,1) is all 1).
.. _/NXellipsometry/ENTRY/SAMPLE/data_error-field:
.. index:: data_error (field)
**data_error**: (recommended) :ref:`NX_NUMBER <NX_NUMBER>` (Rank: 5, Dimensions: [N_time, N_p1, N_angles, N_variables, N_wavelength])
Specified uncertainties (errors) of the data described by data type. The
structure is the same as for the measured data.
.. _/NXellipsometry/ENTRY/SAMPLE/time_points-field:
.. index:: time_points (field)
**time_points**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` (Rank: 1, Dimensions: [N_time]) {units=\ :ref:`NX_TIME <NX_TIME>`}
An array of relative time points if a time series was recorded.
.. _/NXellipsometry/ENTRY/SAMPLE/environment_conditions-group:
**environment_conditions**: (required) :ref:`NXenvironment`
Specify external parameters that have influenced the sample.
.. _/NXellipsometry/ENTRY/SAMPLE/environment_conditions/medium-field:
.. index:: medium (field)
**medium**: (required) :ref:`NX_CHAR <NX_CHAR>`
Describe what was the medium above or around the sample. The common model is
built up from the substrate to the medium on the other side. Both boundaries are
assumed infinite in the model. Here, define the name of the medium (e.g. water,
air, UHV, etc.).
.. _/NXellipsometry/ENTRY/SAMPLE/environment_conditions/medium_refractive_indices-field:
.. index:: medium_refractive_indices (field)
**medium_refractive_indices**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` (Rank: 1, Dimensions: [N_wavelength]) {units=\ :ref:`NX_UNITLESS <NX_UNITLESS>`}
Array of pairs of complex refractive indices of the medium for every measured
wavelength. Only necessary if the measurement was performed not in air, or
something very well known, e.g. high purity water. Specify the complex
refractive index: n + ik
.. _/NXellipsometry/ENTRY/SAMPLE/environment_conditions/number_of_runs-field:
.. index:: number_of_runs (field)
**number_of_runs**: (optional) :ref:`NX_UINT <NX_UINT>` {units=\ :ref:`NX_DIMENSIONLESS <NX_DIMENSIONLESS>`}
How many measurements were done varying the parameters? This forms an extra
dimension beyond incident angle, time points and energy/wavelength (this is the
length of the 4th dimension of the data). Defaults to 1.
.. _/NXellipsometry/ENTRY/SAMPLE/environment_conditions/varied_parameters-field:
.. index:: varied_parameters (field)
**varied_parameters**: (optional) :ref:`NX_CHAR <NX_CHAR>`
Indicates which parameter was changed. Its definition must exist below. The
specified variable has to be number_of_runs long, providing the parameters for
each data set. If you vary more than one parameter simultaneously use one signal
instance for each. Record every parameter value in a linear manner, so N_p1 is
the number of measurements taken. For example, if you measure at two
temperatures and three pressures the temperature signal value looks like [T1,
T1, T1, T2, T2, T2] and the pressure signal value looks like [p1, p2, p3, p1,
p2, p3], and N_p1 = 6.
Any of these values:
* ``optical excitation``
* ``voltage``
* ``temperature``
* ``pH``
* ``stress``
* ``stage positions``
.. _/NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation-group:
**optical_excitation**: (optional) :ref:`NXsource`
Was the sample modified using an optical source? Describe in this group the
parameters of the optical excitation used.
.. _/NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation/wavelength-field:
.. index:: wavelength (field)
**wavelength**: (required) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_LENGTH <NX_LENGTH>`}
Wavelength value(s) or the range used for excitation. In cases of continuous
laser radiation, a value or a set of values may do but for other illumination
types, such as pulsed lasers, or lamps, a range may describe the source better.
.. _/NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation/broadening-field:
.. index:: broadening (field)
**broadening**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_LENGTH <NX_LENGTH>`}
Specify the FWHM of the excitation
.. _/NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation/duration-field:
.. index:: duration (field)
**duration**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_TIME <NX_TIME>`}
How long was the sample excited.
.. _/NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation/pulse_energy-field:
.. index:: pulse_energy (field)
**pulse_energy**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_ENERGY <NX_ENERGY>`}
The integrated energy of light pulse.
.. _/NXellipsometry/ENTRY/SAMPLE/environment_conditions/SENSOR-group:
**SENSOR**: (optional) :ref:`NXsensor`
A sensor used to monitor an external condition. The value field contains the
measured values. If it is constant within an error for every run then use only
an array of length one.
.. _/NXellipsometry/ENTRY/derived_parameters-group:
**derived_parameters**: (optional) :ref:`NXprocess`
What parameters are derived from the above data.
.. _/NXellipsometry/ENTRY/derived_parameters/depolarization-field:
.. index:: depolarization (field)
**depolarization**: (optional) :ref:`NX_NUMBER <NX_NUMBER>` {units=\ :ref:`NX_UNITLESS <NX_UNITLESS>`}
Light loss due to depolarization as a value in [0-1].
.. _/NXellipsometry/ENTRY/plot-group:
**plot**: (optional) :ref:`NXdata`
A default view of the data, in this case Psi vs. wavelength and the angles of
incidence. If Psi does not exist, use other Mueller matrix elements, such as N,
C and S.
.. _/NXellipsometry/ENTRY/plot@axes-attribute:
.. index:: axes (group attribute)
**@axes**: (required) :ref:`NX_CHAR <NX_CHAR>`
We recommend to use wavelength as a default attribute, but it can be replaced in
the case of not full spectral ellipsometry to any suitable parameter along the
X-axis.
Hypertext Anchors
-----------------
List of hypertext anchors for all groups, fields,
attributes, and links defined in this class.
* :ref:`/NXellipsometry/ENTRY-group </NXellipsometry/ENTRY-group>`
* :ref:`/NXellipsometry/ENTRY/acquisition_program-group </NXellipsometry/ENTRY/acquisition_program-group>`
* :ref:`/NXellipsometry/ENTRY/acquisition_program/program-field </NXellipsometry/ENTRY/acquisition_program/program-field>`
* :ref:`/NXellipsometry/ENTRY/acquisition_program/version-field </NXellipsometry/ENTRY/acquisition_program/version-field>`
* :ref:`/NXellipsometry/ENTRY/acquisition_program@url-attribute </NXellipsometry/ENTRY/acquisition_program@url-attribute>`
* :ref:`/NXellipsometry/ENTRY/definition-field </NXellipsometry/ENTRY/definition-field>`
* :ref:`/NXellipsometry/ENTRY/definition@url-attribute </NXellipsometry/ENTRY/definition@url-attribute>`
* :ref:`/NXellipsometry/ENTRY/definition@version-attribute </NXellipsometry/ENTRY/definition@version-attribute>`
* :ref:`/NXellipsometry/ENTRY/derived_parameters-group </NXellipsometry/ENTRY/derived_parameters-group>`
* :ref:`/NXellipsometry/ENTRY/derived_parameters/depolarization-field </NXellipsometry/ENTRY/derived_parameters/depolarization-field>`
* :ref:`/NXellipsometry/ENTRY/experiment_description-field </NXellipsometry/ENTRY/experiment_description-field>`
* :ref:`/NXellipsometry/ENTRY/experiment_identifier-field </NXellipsometry/ENTRY/experiment_identifier-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT-group </NXellipsometry/ENTRY/INSTRUMENT-group>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/angle_of_incidence-field </NXellipsometry/ENTRY/INSTRUMENT/angle_of_incidence-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/angular_spread-field </NXellipsometry/ENTRY/INSTRUMENT/angular_spread-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration-group </NXellipsometry/ENTRY/INSTRUMENT/calibration-group>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data-group </NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data-group>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_angle_of_incidence-field </NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_angle_of_incidence-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_data-field </NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_data-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_data_type-field </NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_data_type-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_wavelength-field </NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_wavelength-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_sample-field </NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_sample-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_time-field </NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_time-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration_status-field </NXellipsometry/ENTRY/INSTRUMENT/calibration_status-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/company-field </NXellipsometry/ENTRY/INSTRUMENT/company-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/construction_year-field </NXellipsometry/ENTRY/INSTRUMENT/construction_year-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/data_correction-field </NXellipsometry/ENTRY/INSTRUMENT/data_correction-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR-group </NXellipsometry/ENTRY/INSTRUMENT/DETECTOR-group>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/detector_type-field </NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/detector_type-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/fixed_revolution-field </NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/fixed_revolution-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/intensity_threshold-field </NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/intensity_threshold-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/min_intensity-field </NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/min_intensity-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/other_detector-field </NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/other_detector-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/revolution-field </NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/revolution-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/rotating_element-field </NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/rotating_element-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/variable_revolution-field </NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/variable_revolution-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/ellipsometry_type-field </NXellipsometry/ENTRY/INSTRUMENT/ellipsometry_type-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/firmware-field </NXellipsometry/ENTRY/INSTRUMENT/firmware-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/firmware@url-attribute </NXellipsometry/ENTRY/INSTRUMENT/firmware@url-attribute>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/firmware@version-attribute </NXellipsometry/ENTRY/INSTRUMENT/firmware@version-attribute>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/focussing_probes-field </NXellipsometry/ENTRY/INSTRUMENT/focussing_probes-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/light_source-group </NXellipsometry/ENTRY/INSTRUMENT/light_source-group>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/model-field </NXellipsometry/ENTRY/INSTRUMENT/model-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/model@version-attribute </NXellipsometry/ENTRY/INSTRUMENT/model@version-attribute>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/spectrometer-group </NXellipsometry/ENTRY/INSTRUMENT/spectrometer-group>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/GRATING-group </NXellipsometry/ENTRY/INSTRUMENT/spectrometer/GRATING-group>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/GRATING/angular_dispersion-field </NXellipsometry/ENTRY/INSTRUMENT/spectrometer/GRATING/angular_dispersion-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/GRATING/grating_wavelength_max-field </NXellipsometry/ENTRY/INSTRUMENT/spectrometer/GRATING/grating_wavelength_max-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/GRATING/grating_wavelength_min-field </NXellipsometry/ENTRY/INSTRUMENT/spectrometer/GRATING/grating_wavelength_min-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/SLIT-group </NXellipsometry/ENTRY/INSTRUMENT/spectrometer/SLIT-group>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/SLIT/fixed_slit-field </NXellipsometry/ENTRY/INSTRUMENT/spectrometer/SLIT/fixed_slit-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/SLIT/max_gap-field </NXellipsometry/ENTRY/INSTRUMENT/spectrometer/SLIT/max_gap-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/spectral_resolution-field </NXellipsometry/ENTRY/INSTRUMENT/spectrometer/spectral_resolution-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/spectrometer/wavelength-field </NXellipsometry/ENTRY/INSTRUMENT/spectrometer/wavelength-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/stage-group </NXellipsometry/ENTRY/INSTRUMENT/stage-group>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/stage/description-field </NXellipsometry/ENTRY/INSTRUMENT/stage/description-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/stage/stage_type-field </NXellipsometry/ENTRY/INSTRUMENT/stage/stage_type-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/stage/TRANSFORMATIONS-group </NXellipsometry/ENTRY/INSTRUMENT/stage/TRANSFORMATIONS-group>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/stage/TRANSFORMATIONS/alternative-field </NXellipsometry/ENTRY/INSTRUMENT/stage/TRANSFORMATIONS/alternative-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window-group </NXellipsometry/ENTRY/INSTRUMENT/window-group>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/material-field </NXellipsometry/ENTRY/INSTRUMENT/window/material-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/orientation_angle-field </NXellipsometry/ENTRY/INSTRUMENT/window/orientation_angle-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/other_material-field </NXellipsometry/ENTRY/INSTRUMENT/window/other_material-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data-group </NXellipsometry/ENTRY/INSTRUMENT/window/reference_data-group>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/data-field </NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/data-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/reference_sample-field </NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/reference_sample-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/reference_wavelength-field </NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/reference_wavelength-field>`
* :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/thickness-field </NXellipsometry/ENTRY/INSTRUMENT/window/thickness-field>`
* :ref:`/NXellipsometry/ENTRY/plot-group </NXellipsometry/ENTRY/plot-group>`
* :ref:`/NXellipsometry/ENTRY/plot@axes-attribute </NXellipsometry/ENTRY/plot@axes-attribute>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE-group </NXellipsometry/ENTRY/SAMPLE-group>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/atom_types-field </NXellipsometry/ENTRY/SAMPLE/atom_types-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/column_names-field </NXellipsometry/ENTRY/SAMPLE/column_names-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/data_error-field </NXellipsometry/ENTRY/SAMPLE/data_error-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/data_identifier-field </NXellipsometry/ENTRY/SAMPLE/data_identifier-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/data_type-field </NXellipsometry/ENTRY/SAMPLE/data_type-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/environment_conditions-group </NXellipsometry/ENTRY/SAMPLE/environment_conditions-group>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/environment_conditions/medium-field </NXellipsometry/ENTRY/SAMPLE/environment_conditions/medium-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/environment_conditions/medium_refractive_indices-field </NXellipsometry/ENTRY/SAMPLE/environment_conditions/medium_refractive_indices-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/environment_conditions/number_of_runs-field </NXellipsometry/ENTRY/SAMPLE/environment_conditions/number_of_runs-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation-group </NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation-group>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation/broadening-field </NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation/broadening-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation/duration-field </NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation/duration-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation/pulse_energy-field </NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation/pulse_energy-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation/wavelength-field </NXellipsometry/ENTRY/SAMPLE/environment_conditions/optical_excitation/wavelength-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/environment_conditions/SENSOR-group </NXellipsometry/ENTRY/SAMPLE/environment_conditions/SENSOR-group>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/environment_conditions/varied_parameters-field </NXellipsometry/ENTRY/SAMPLE/environment_conditions/varied_parameters-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/layer_structure-field </NXellipsometry/ENTRY/SAMPLE/layer_structure-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/measured_data-field </NXellipsometry/ENTRY/SAMPLE/measured_data-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/preparation_date-field </NXellipsometry/ENTRY/SAMPLE/preparation_date-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/sample_history-field </NXellipsometry/ENTRY/SAMPLE/sample_history-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/sample_name-field </NXellipsometry/ENTRY/SAMPLE/sample_name-field>`
* :ref:`/NXellipsometry/ENTRY/SAMPLE/time_points-field </NXellipsometry/ENTRY/SAMPLE/time_points-field>`
* :ref:`/NXellipsometry/ENTRY/start_time-field </NXellipsometry/ENTRY/start_time-field>`
* :ref:`/NXellipsometry/ENTRY/USER-group </NXellipsometry/ENTRY/USER-group>`
* :ref:`/NXellipsometry/ENTRY/USER/address-field </NXellipsometry/ENTRY/USER/address-field>`
* :ref:`/NXellipsometry/ENTRY/USER/affiliation-field </NXellipsometry/ENTRY/USER/affiliation-field>`
* :ref:`/NXellipsometry/ENTRY/USER/email-field </NXellipsometry/ENTRY/USER/email-field>`
* :ref:`/NXellipsometry/ENTRY/USER/name-field </NXellipsometry/ENTRY/USER/name-field>`
* :ref:`/NXellipsometry/ENTRY/USER/orcid-field </NXellipsometry/ENTRY/USER/orcid-field>`
* :ref:`/NXellipsometry/ENTRY/USER/telephone_number-field </NXellipsometry/ENTRY/USER/telephone_number-field>`
**NXDL Source**:
https://github.com/nexusformat/definitions/blob/main/contributed_definitions/NXellipsometry.nxdl.xml