.. auto-generated by script ../../../../utils/nxdl2rst.py from the NXDL source NXellipsometry.nxdl.xml .. index:: ! NXellipsometry (application definition) ! ellipsometry (application definition) see: ellipsometry (application definition); NXellipsometry .. _NXellipsometry: ============== NXellipsometry ============== **Status**: application definition, extends :ref:`NXobject` **Description**: Draft application definition for ellipsometry measurements, including complex systems up to variable angle spectroscopic ellipsometry. In this application definition, times should be specified always together with a UTC offset. **Symbols**: Variables used throughout the document, e.g. dimensions and important parameters **N_wavelength**: Size of the energy / wavelength vector used **N_variables**: How many variables are saved in a measurement (e.g. Psi and Delta, Mueller matrix. **N_angles**: Number of incident angles used **N_p1**: Number of sample parameters scanned **N_time**: Number of time points measured **Groups cited**: :ref:`NX_TIME`, :ref:`NXaperture`, :ref:`NXcollection`, :ref:`NXdata`, :ref:`NXdetector`, :ref:`NXentry`, :ref:`NXinstrument`, :ref:`NXsample`, :ref:`NXsubentry`, :ref:`NXtransformations`, :ref:`NXuser` .. index:: NXentry (base class); used in application definition, NXuser (base class); used in application definition, NXinstrument (base class); used in application definition, NXsubentry (base class); used in application definition, NXtransformations (base class); used in application definition, NXaperture (base class); used in application definition, NXdetector (base class); used in application definition, NXsample (base class); used in application definition, NX_TIME (base class); used in application definition, NXcollection (base class); used in application definition, NXdata (base class); used in application definition **Structure**: .. _/NXellipsometry/ENTRY-group: **ENTRY**: (required) :ref:`NXentry` "This is the application definition describing ellipsometry experiments. Such experiments may be as simple as identifying how a reflected beam of light with a single wavelength changes its polarization state, to a variable angle spectroscopic ellipsometry experiment. The application definition defines: - elements of the experimental instrument - calibration information if available - parameters used to tune the state of the sample - sample description" .. _/NXellipsometry/ENTRY/definition-field: .. index:: definition (field) **definition**: (required) :ref:`NX_CHAR ` An application definition for ellipsometry. Obligatory value: ``NXellipsometry`` .. _/NXellipsometry/ENTRY/definition@version-attribute: .. index:: version (field attribute) **@version**: (required) :ref:`NX_CHAR ` Version number to identify which definition of this application definition was used for this entry/data. .. _/NXellipsometry/ENTRY/definition@url-attribute: .. index:: url (field attribute) **@url**: (required) :ref:`NX_CHAR ` URL where to find further material (documentation, examples) relevant to the application definition .. _/NXellipsometry/ENTRY/experiment_identifier-field: .. index:: experiment_identifier (field) **experiment_identifier**: (required) :ref:`NX_CHAR ` Unique identifier of the experiment, such as a (globally persistent) unique identifier. - The identifier is usually defined by the facility or principle investigator. - The identifier enables to link experiments to e.g. proposals. .. _/NXellipsometry/ENTRY/experiment_description-field: .. index:: experiment_description (field) **experiment_description**: (required) :ref:`NX_CHAR ` .. _/NXellipsometry/ENTRY/start_time-field: .. index:: start_time (field) **start_time**: (required) :ref:`NX_DATE_TIME ` UTC offset should be specifiec. .. _/NXellipsometry/ENTRY/program-field: .. index:: program (field) **program**: (optional) :ref:`NX_CHAR ` Commercial or otherwise defined given name to the program that was used to generate the results file(s) with measured data and metadata (or a link to the instrument software). .. _/NXellipsometry/ENTRY/program@version-attribute: .. index:: version (field attribute) **@version**: (required) :ref:`NX_CHAR ` Either version with build number, commit hash, or description of a (online) repository where the source code of the program and build instructions can be found so that the program can be configured in such a way that result files can be created ideally in a deterministic manner. .. _/NXellipsometry/ENTRY/program@url-attribute: .. index:: url (field attribute) **@url**: (required) :ref:`NX_CHAR ` Website of the software. .. _/NXellipsometry/ENTRY/operator-group: **operator**: (required) :ref:`NXuser` Contact information of at least the user of the instrument or the investigator who performed this experiment. Adding multiple users if relevant is recommended. .. _/NXellipsometry/ENTRY/operator/name-field: .. index:: name (field) **name**: (required) :ref:`NX_CHAR ` .. _/NXellipsometry/ENTRY/operator/affiliation-field: .. index:: affiliation (field) **affiliation**: (required) :ref:`NX_CHAR ` Name of the affiliation of the user at the point in time when the experiment was performed. .. _/NXellipsometry/ENTRY/operator/address-field: .. index:: address (field) **address**: (required) :ref:`NX_CHAR ` .. _/NXellipsometry/ENTRY/operator/email-field: .. index:: email (field) **email**: (required) :ref:`NX_CHAR ` .. _/NXellipsometry/ENTRY/operator/orcid-field: .. index:: orcid (field) **orcid**: (recommended) :ref:`NX_CHAR ` .. _/NXellipsometry/ENTRY/operator/telephone_number-field: .. index:: telephone_number (field) **telephone_number**: (recommended) :ref:`NX_CHAR ` .. _/NXellipsometry/ENTRY/INSTRUMENT-group: **INSTRUMENT**: (required) :ref:`NXinstrument` General properties of the ellipsometry equipment .. _/NXellipsometry/ENTRY/INSTRUMENT/model-field: .. index:: model (field) **model**: (required) :ref:`NX_CHAR ` The name of the instrument .. _/NXellipsometry/ENTRY/INSTRUMENT/model@version-attribute: .. index:: version (field attribute) **@version**: (required) :ref:`NX_CHAR ` The used version of the hardware if available. If not a commercial instrument use date of completion of the hardware. .. _/NXellipsometry/ENTRY/INSTRUMENT/company-field: .. index:: company (field) **company**: (optional) :ref:`NX_CHAR ` Name of the company which build the instrument .. _/NXellipsometry/ENTRY/INSTRUMENT/construction_year-field: .. index:: construction_year (field) **construction_year**: (optional) :ref:`NX_DATE_TIME ` ISO8601 date when the instrument was constructed. UTC offset should be specifiec. .. _/NXellipsometry/ENTRY/INSTRUMENT/software-field: .. index:: software (field) **software**: (required) :ref:`NX_CHAR ` Name (e.g. commercial) of the software that was used for the measurement .. _/NXellipsometry/ENTRY/INSTRUMENT/software@version-attribute: .. index:: version (field attribute) **@version**: (required) :ref:`NX_CHAR ` Version and build number or commit hash of the software source code .. _/NXellipsometry/ENTRY/INSTRUMENT/software@url-attribute: .. index:: url (field attribute) **@url**: (required) :ref:`NX_CHAR ` Website of the software. .. _/NXellipsometry/ENTRY/INSTRUMENT/light_source-field: .. index:: light_source (field) **light_source**: (required) :ref:`NX_CHAR ` Specify the used light source. Multiple selection possible. Any of these values: * ``UV light`` * ``quartz tungsten halogen lamp`` * ``xenon arc lamp`` * ``deuterium lamp`` * ``silicon carbide globar`` * ``other`` .. _/NXellipsometry/ENTRY/INSTRUMENT/other_light_source-field: .. index:: other_light_source (field) **other_light_source**: (optional) :ref:`NX_CHAR ` If you specified 'other' as light source type, please write down what it is. .. _/NXellipsometry/ENTRY/INSTRUMENT/focussing_probes-field: .. index:: focussing_probes (field) **focussing_probes**: (required) :ref:`NX_BOOLEAN ` Were focussing probes (lenses) used or not? .. _/NXellipsometry/ENTRY/INSTRUMENT/data_correction-field: .. index:: data_correction (field) **data_correction**: (optional) :ref:`NX_BOOLEAN ` Were the recorded data corrected by the window effects of the lenses or not? .. _/NXellipsometry/ENTRY/INSTRUMENT/angular_spread-field: .. index:: angular_spread (field) **angular_spread**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_ANGLE `} Specify the angular spread caused by the focussing probes .. _/NXellipsometry/ENTRY/INSTRUMENT/ellipsometry_type-field: .. index:: ellipsometry_type (field) **ellipsometry_type**: (required) :ref:`NX_CHAR ` What type of ellipsometry was used? See Fujiwara Table 4.2 Any of these values: * ``rotating analyzer`` * ``rotating analyzer with analyzer compensator`` * ``rotating analyzer with polarizer compensator`` * ``rotating polarizer`` * ``rotating compensator on polarizer side`` * ``rotating compensator on analyzer side`` * ``modulator on polarizer side`` * ``modulator on analyzer side`` * ``dual compensator`` * ``phase modulation`` * ``imaging ellipsometry`` * ``null ellipsometry`` .. _/NXellipsometry/ENTRY/INSTRUMENT/angle_of_incidence-field: .. index:: angle_of_incidence (field) **angle_of_incidence[N_angles]**: (required) :ref:`NX_NUMBER ` {units=\ :ref:`NX_ANGLE `} Incident angle of the beam vs. the normal of the bottom reflective (substrate) surface in the sample .. _/NXellipsometry/ENTRY/INSTRUMENT/calibration-group: **calibration**: (recommended) :ref:`NXsubentry` Ellipsometers require regular calibration to adjust the hardware parameters for proper zero values and background light compensation. .. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_time-field: .. index:: calibration_time (field) **calibration_time**: (required) :ref:`NX_DATE_TIME ` ISO8601 datum when calibration was last performed before this measurement. UTC offset should be specifiec. .. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_sample-field: .. index:: calibration_sample (field) **calibration_sample**: (required) :ref:`NX_CHAR ` Free-text to describe which sample was used for calibration, e.g. silicon wafer with 25 nm thermal oxide layer. .. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data-group: **calibration_data**: (required) :ref:`NXsubentry` Arrays which provide the measured calibration data. Multiple sets are possible, e.g. Psi and delta measured on an e.g. silicon calibration waver, and the straight-through data. We recommend to provide data that is measured under the same settings as the measurement was performed, that is if Psi and delta are measured for your data, also provide Psi and delta here. And use the same wavelenghts as there. .. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_data_type-field: .. index:: calibration_data_type (field) **calibration_data_type**: (required) :ref:`NX_CHAR ` What data was recorded for the calibration, The number of variables (N_variables) have to be set to the number of provided data columns accordingly, e.g. psi/delta -> N_variables= 2, Jones vector: N_variables = 4, Mueller martix -> N_variables= 16, etc. Any of these values: * ``psi/delta`` * ``tan(psi)/cos(delta)`` * ``Jones matrix`` * ``Mueller matrix`` * ``not provided`` .. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_angle_of_incidence-field: .. index:: calibration_angle_of_incidence (field) **calibration_angle_of_incidence[N_calibration_angles]**: (required) :ref:`NX_NUMBER ` {units=\ :ref:`NX_ANGLE `} angle(s) of incidence used during the calibration measurement (excluding straight through mode) .. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_wavelength-field: .. index:: calibration_wavelength (field) **calibration_wavelength[N_calibration_wavelength]**: (required) :ref:`NX_NUMBER ` The wavelength or equivalent values (which are inter-convertible). The importer should convert all to one unit, and make the others accessible. Historically, energy is used in eV, but for visible spectroscopy wavelength is more common, for IR wave numbers in 1/cm units. Possibly use the same type of data as for the measurement! .. _/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_data-field: .. index:: calibration_data (field) **calibration_data[N_calibration_angles+1, N_variables, N_calibration_wavelength]**: (required) :ref:`NX_NUMBER ` {units=\ :ref:`NX_UNITLESS `} Calibration is performed on a reference surface (usually silicon wafer with well defined oxide layer) at a number of angles, then in a straight through mode (transmission in air). .. _/NXellipsometry/ENTRY/INSTRUMENT/stage-group: **stage**: (recommended) :ref:`NXsubentry` Sample stage, holding the sample at a specific position in X,Y,Z (Cartesian) coordinate system and at an orientation defined by three Euler angles (alpha, beta, gamma). The stage may be motorized or manual, special for liquids or gas environment. .. _/NXellipsometry/ENTRY/INSTRUMENT/stage/description-field: .. index:: description (field) **description**: (recommended) :ref:`NX_CHAR ` .. _/NXellipsometry/ENTRY/INSTRUMENT/stage/TRANSFORMATIONS-group: **TRANSFORMATIONS**: (recommended) :ref:`NXtransformations` The stage coordinate system vs. the incident beam. The Z-axis of the stage is considered to point along the normal of the substrate (bottom reflecting surface) from the stage towards the general direction of the light source. The beam comes with angle of incidence towards this Z-axis, but in opposite direction, thus they are connected with a rotation of 180 - angle of incidence (in degrees). This transformation brings us from the NEXUS coordinates to the stage coordinates. Then provide the set of translations (if there are any). These all have a vector defining their relative direction in the current coordinate system. (This current coordinate system changes with every transformation if you set the parameter 'depends' to the name of the previous step.) Last, provide the rotations of the sample .. _/NXellipsometry/ENTRY/INSTRUMENT/stage/TRANSFORMATIONS/alternative-field: .. index:: alternative (field) **alternative**: (optional) :ref:`NX_CHAR ` If there is no motorized stage, we should at least qualify where the beam hits the sample and in what direction the sample stands in a free-text description, e.g. 'center of sample, long edge parallel to plane of incidence'. .. _/NXellipsometry/ENTRY/INSTRUMENT/window-group: **window**: (optional) :ref:`NXaperture` For environmental measurements, the environment (liquid, vapor etc.) is enclosed in a cell, which has windows both in the direction of the source and the detector (looking from the sample). These windows also add a phase shift to the light altering the measured signal. This shift has to be corrected based on measuring a known sample in the environmental cell. .. _/NXellipsometry/ENTRY/INSTRUMENT/window/material-field: .. index:: material (field) **material**: (required) :ref:`NX_CHAR ` the material of the window .. _/NXellipsometry/ENTRY/INSTRUMENT/window/thickness-field: .. index:: thickness (field) **thickness**: (required) :ref:`NX_NUMBER ` {units=\ :ref:`NX_LENGTH `} Thickness of the window .. _/NXellipsometry/ENTRY/INSTRUMENT/window/orientation_angle-field: .. index:: orientation_angle (field) **orientation_angle**: (required) :ref:`NX_NUMBER ` {units=\ :ref:`NX_ANGLE `} Angle of the window normal (outer) vs. the substrate normal (similar to the angle of incidence). .. _/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data-group: **reference_data**: (required) :ref:`NXsubentry` Recorded data that can be used to calculate the window effect. Typically this is the substrate (e.g. silicon with thermal oxide layer) in air without window and in a known medium with the window. .. _/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/reference_sample-field: .. index:: reference_sample (field) **reference_sample**: (required) :ref:`NX_CHAR ` What sample was used to estimate the window effect. .. _/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/reference_wavelength-field: .. index:: reference_wavelength (field) **reference_wavelength[N_wavelength]**: (required) :ref:`NX_NUMBER ` {units=\ :ref:`NX_LENGTH `} Use the same wavelengths at which all other measurements are recorded .. _/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/data-field: .. index:: data (field) **data[2, N_angles, N_variables, N_wavelength]**: (required) :ref:`NX_NUMBER ` {units=\ :ref:`NX_UNITLESS `} Recorded data of a reference surface with and without window / medium. .. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR-group: **DETECTOR**: (required) :ref:`NXdetector` Which type of detector was used, and what is known about it? A detector can be a photomultiplier (PMT), a CCD in a camera, an array in a spectrometer. If so, the whole detector unit goes in here. .. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/detector_type-field: .. index:: detector_type (field) **detector_type**: (required) :ref:`NX_CHAR ` What kind of detector module is used, e.g. CCD-spectrometer, CCD camera, PMT, photodiode, etc. Any of these values: * ``PMT`` * ``photodiode`` * ``avalanche diode`` * ``CCD camera`` * ``CCD spectrometer`` * ``other`` .. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/other_detector-field: .. index:: other_detector (field) **other_detector**: (optional) :ref:`NX_CHAR ` If you specified 'other' as detector type, please write down what it is. .. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/integration_time-field: .. index:: integration_time (field) **integration_time**: (required) :ref:`NX_NUMBER ` {units=\ :ref:`NX_TIME `} Integration time for the measurement. Single number or array if it was varied. .. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/revolution-field: .. index:: revolution (field) **revolution**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_ANY `} Define how many rotations of the rotating element were taken into account per spectrum. .. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/rotating_element-field: .. index:: rotating_element (field) **rotating_element**: (required) :ref:`NX_CHAR ` Define which elements rotates, e.g. polarizer or analyzer. Any of these values: * ``polarizer (source side)`` * ``analyzer (detector side)`` * ``compensator (source side)`` * ``compensator (detector side)`` .. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/fixed_revolution-field: .. index:: fixed_revolution (field) **fixed_revolution**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_FREQUENCY `} rotation rate, if the revolution does not change during the measurement. .. _/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/variable_revolution-field: .. index:: variable_revolution (field) **variable_revolution[2]**: (optional) :ref:`NX_NUMBER ` Specify maximum and minimum values for the revolution. .. _/NXellipsometry/ENTRY/SAMPLE-group: **SAMPLE**: (required) :ref:`NXsample` Properties of the sample, its history, the sample environment and experimental conditions (e.g. surrounding medium, temperature, pressure etc.), along with the data (data type, wavelength array, measured data). .. _/NXellipsometry/ENTRY/SAMPLE/atom_types-field: .. index:: atom_types (field) **atom_types**: (required) :ref:`NX_CHAR ` Use Hill's system for listing elements of the periodic table which are inside or attached to the surface of the specimen and thus relevant from a scientific point. The purpose of this field is to allow materials database to parse the relevant elements without having to interpret the sample history or other fields. .. _/NXellipsometry/ENTRY/SAMPLE/sample_name-field: .. index:: sample_name (field) **sample_name**: (required) :ref:`NX_CHAR ` .. _/NXellipsometry/ENTRY/SAMPLE/sample_history-field: .. index:: sample_history (field) **sample_history**: (required) :ref:`NX_CHAR ` Ideally, a reference to the location or a unique (globally persistent) identifier (e.g.) of e.g. another file which gives as many as possible details of the material, its microstructure, and its thermo-chemo-mechanical processing/preparation history. In the case that such a detailed history of the sample is not available, use this field as a free-text description to specify details of the sample and its preparation. .. _/NXellipsometry/ENTRY/SAMPLE/preparation_date-field: .. index:: preparation_date (field) **preparation_date**: (recommended) :ref:`NX_DATE_TIME ` ISO 8601 date with time zone specified. UTC offset should be specifiec. .. _/NXellipsometry/ENTRY/SAMPLE/layer_structure-field: .. index:: layer_structure (field) **layer_structure**: (required) :ref:`NX_CHAR ` Qualitative description of the layer structure for the sample. For example: Si/native oxide/thermal oxide/polymer/peptide .. _/NXellipsometry/ENTRY/SAMPLE/data_identifier-field: .. index:: data_identifier (field) **data_identifier**: (required) :ref:`NX_NUMBER ` A identifier to correlate data to the experimental conditions, if several were used in this measurement; typically an index of 0 - N .. _/NXellipsometry/ENTRY/SAMPLE/data_type-field: .. index:: data_type (field) **data_type**: (required) :ref:`NX_CHAR ` Select which type of data was recorded, for example Psi and Delta (see: https://en.wikipedia.org/wiki/Ellipsometry#Data_acquisition). It is possible to have multiple selections. Data types may also be converted to each other, e.g. a Mueller matrix contains N,C,S data as well. This selection defines how many columns (N_variables) are stored in the data array. Any of these values: * ``psi / delta`` * ``tan(psi)/cos(delta)`` * ``Mueller matrix`` * ``Jones matrix`` * ``N/C/S`` * ``raw data`` .. _/NXellipsometry/ENTRY/SAMPLE/wavelength-field: .. index:: wavelength (field) **wavelength[N_wavelength]**: (required) :ref:`NX_NUMBER ` {units=\ :ref:`NX_LENGTH `} Wavelength value(s) used for the measurement. An array of 1 or more elements. Length defines N_wavelength .. _/NXellipsometry/ENTRY/SAMPLE/measured_data-field: .. index:: measured_data (field) **measured_data[N_time, N_p1, N_angles, N_variables, N_wavelength]**: (required) :ref:`NX_NUMBER ` Resulting data from the measurement, described by data type. Minimum two columns containing Psi and delta, or for the normalized Mueller matrix, it may be 16 (or 15 if 1,1 is all 1). .. _/NXellipsometry/ENTRY/SAMPLE/uncertainty-field: .. index:: uncertainty (field) **uncertainty[N_time, N_p1, N_angles, N_variables, N_wavelength]**: (recommended) :ref:`NX_NUMBER ` Specified uncertainties (errors) of the data described by data type. The structure is the same as for the measured data. .. _/NXellipsometry/ENTRY/SAMPLE/time_points-field: .. index:: time_points (field) **time_points**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_TIME `} An array of relative time points if a time series was recorded .. _/NXellipsometry/ENTRY/SAMPLE/medium-field: .. index:: medium (field) **medium**: (required) :ref:`NX_CHAR ` Describe what was the medium above or around the sample. The common model is built up from substrate to the medium on the other side. Both boundaries are assumed infinite in the model. Here define the name of the material (e.g. water, air, etc.). .. _/NXellipsometry/ENTRY/SAMPLE/medium_refractive_indices-field: .. index:: medium_refractive_indices (field) **medium_refractive_indices[N_wavelength]**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_UNITLESS `} Array of pairs of complex refractive indices of the medium for every measured wavelength. Only necessary if the measurement was performed not in air, or something very well known, e.g. high purity water. Specify the complex refractive index: n + ik .. _/NXellipsometry/ENTRY/SAMPLE/environment_conditions-field: .. index:: environment_conditions (field) **environment_conditions**: (optional) :ref:`NX_CHAR ` External parameters that have influenced the sample. .. _/NXellipsometry/ENTRY/SAMPLE/number_of_runs-field: .. index:: number_of_runs (field) **number_of_runs**: (optional) :ref:`NX_UINT ` {units=\ :ref:`NX_DIMENSIONLESS `} How many measurements were done varying the parameters? This forms an extra dimension beyond incident angle, time points and energy / wavelength (this is the length of the 4th dimension of the data). Defaults to 1. .. _/NXellipsometry/ENTRY/SAMPLE/varied_parameters-field: .. index:: varied_parameters (field) **varied_parameters**: (optional) :ref:`NX_CHAR ` Indicates which parameter was changed. Its definition must exist below. The specified variable has to be number_of_runs long, providing the parameters for each data set. Any of these values: * ``optical excitation`` * ``voltage`` * ``temperature`` * ``pH`` * ``stress`` * ``stage positions`` .. _/NXellipsometry/ENTRY/SAMPLE/voltage-field: .. index:: voltage (field) **voltage**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_VOLTAGE `} Specify the voltage if the spectra were taken under bias .. _/NXellipsometry/ENTRY/SAMPLE/temperature-field: .. index:: temperature (field) **temperature**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_TEMPERATURE `} Temperature of the sample (sample holder, medium) .. _/NXellipsometry/ENTRY/SAMPLE/pH-field: .. index:: pH (field) **pH**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_UNITLESS `} pH of medium (measured or set) .. _/NXellipsometry/ENTRY/SAMPLE/pressure-field: .. index:: pressure (field) **pressure**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_PRESSURE `} Pressure of the environment of the sample. .. _/NXellipsometry/ENTRY/SAMPLE/optical_excitation-group: **optical_excitation**: (optional) :ref:`NXsubentry` Was the sample modified using an optical source? Describe in this group the parameters of the optical excitation used. .. _/NXellipsometry/ENTRY/SAMPLE/optical_excitation/excitation_source-field: .. index:: excitation_source (field) **excitation_source**: (required) :ref:`NX_CHAR ` Specify the source for the external excitation .. _/NXellipsometry/ENTRY/SAMPLE/optical_excitation/excitation_wavelength-field: .. index:: excitation_wavelength (field) **excitation_wavelength**: (required) :ref:`NX_NUMBER ` {units=\ :ref:`NX_LENGTH `} Wavelength value(s) or the range used for excitation. In cases of continuous laser radiation a value or a set of values may do but for other illumination types, such as pulsed lasers, or lamps, a range may describe the source better. .. _/NXellipsometry/ENTRY/SAMPLE/optical_excitation/broadening-field: .. index:: broadening (field) **broadening**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_LENGTH `} Specify the FWHM of the excitation .. _/NXellipsometry/ENTRY/SAMPLE/optical_excitation/excitation_type-field: .. index:: excitation_type (field) **excitation_type**: (required) :ref:`NX_CHAR ` CW or pulsed excitation Any of these values: ``cw`` | ``pulsed`` .. _/NXellipsometry/ENTRY/SAMPLE/optical_excitation/pulse_length-field: .. index:: pulse_length (field) **pulse_length**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_TIME `} .. _/NXellipsometry/ENTRY/SAMPLE/optical_excitation/repetition_rate-field: .. index:: repetition_rate (field) **repetition_rate**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_FREQUENCY `} .. _/NXellipsometry/ENTRY/SAMPLE/optical_excitation/pulse_energy-field: .. index:: pulse_energy (field) **pulse_energy**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_ENERGY `} The integrated energy of light pulse. .. _/NXellipsometry/ENTRY/SAMPLE/optical_excitation/excitation_power-field: .. index:: excitation_power (field) **excitation_power**: (optional) :ref:`NX_NUMBER ` {units=\ :ref:`NX_ENERGY `} .. _/NXellipsometry/ENTRY/SAMPLE/optical_excitation/excitation_duration-group: **excitation_duration**: (optional) :ref:`NX_TIME` How long was the sample excited. .. _/NXellipsometry/ENTRY/derived_parameters-group: **derived_parameters**: (optional) :ref:`NXcollection` What parameters are derived from the above data .. _/NXellipsometry/ENTRY/derived_parameters/depolarization-field: .. index:: depolarization (field) **depolarization**: (required) :ref:`NX_NUMBER ` {units=\ :ref:`NX_UNITLESS `} light loss due to depolarization as a value in [0-1] .. _/NXellipsometry/ENTRY/plot-group: **plot**: (optional) :ref:`NXdata` A default view of the data, in this case wavelength vs. Psi and the angles of incidence. If Psi does not exist, use other Müller matrix elements, such as N, C and S. .. _/NXellipsometry/ENTRY/plot@axes-attribute: .. index:: axes (group attribute) **@axes**: (required) :ref:`NX_CHAR ` We recommend to use wavelength as a default attribute, but it can be replaced in the case of not full spectral ellipsometry to any suitable parameter along the X-axis. Hypertext Anchors ----------------- Table of hypertext anchors for all groups, fields, attributes, and links defined in this class. ============================================================================================================================================================================================================== ============================================================================================================================================================================================================== documentation (reST source) anchor web page (HTML) anchor ============================================================================================================================================================================================================== ============================================================================================================================================================================================================== :ref:`/NXellipsometry/ENTRY-group ` :ref:`#nxellipsometry-entry-group ` :ref:`/NXellipsometry/ENTRY/definition-field ` :ref:`#nxellipsometry-entry-definition-field ` :ref:`/NXellipsometry/ENTRY/definition@url-attribute ` :ref:`#nxellipsometry-entry-definition-url-attribute ` :ref:`/NXellipsometry/ENTRY/definition@version-attribute ` :ref:`#nxellipsometry-entry-definition-version-attribute ` :ref:`/NXellipsometry/ENTRY/derived_parameters-group ` :ref:`#nxellipsometry-entry-derived-parameters-group ` :ref:`/NXellipsometry/ENTRY/derived_parameters/depolarization-field ` :ref:`#nxellipsometry-entry-derived-parameters-depolarization-field ` :ref:`/NXellipsometry/ENTRY/experiment_description-field ` :ref:`#nxellipsometry-entry-experiment-description-field ` :ref:`/NXellipsometry/ENTRY/experiment_identifier-field ` :ref:`#nxellipsometry-entry-experiment-identifier-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT-group ` :ref:`#nxellipsometry-entry-instrument-group ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/angle_of_incidence-field ` :ref:`#nxellipsometry-entry-instrument-angle-of-incidence-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/angular_spread-field ` :ref:`#nxellipsometry-entry-instrument-angular-spread-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration-group ` :ref:`#nxellipsometry-entry-instrument-calibration-group ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data-group ` :ref:`#nxellipsometry-entry-instrument-calibration-calibration-data-group ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_angle_of_incidence-field ` :ref:`#nxellipsometry-entry-instrument-calibration-calibration-data-calibration-angle-of-incidence-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_data-field ` :ref:`#nxellipsometry-entry-instrument-calibration-calibration-data-calibration-data-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_data_type-field ` :ref:`#nxellipsometry-entry-instrument-calibration-calibration-data-calibration-data-type-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_data/calibration_wavelength-field ` :ref:`#nxellipsometry-entry-instrument-calibration-calibration-data-calibration-wavelength-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_sample-field ` :ref:`#nxellipsometry-entry-instrument-calibration-calibration-sample-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/calibration/calibration_time-field ` :ref:`#nxellipsometry-entry-instrument-calibration-calibration-time-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/company-field ` :ref:`#nxellipsometry-entry-instrument-company-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/construction_year-field ` :ref:`#nxellipsometry-entry-instrument-construction-year-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/data_correction-field ` :ref:`#nxellipsometry-entry-instrument-data-correction-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR-group ` :ref:`#nxellipsometry-entry-instrument-detector-group ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/detector_type-field ` :ref:`#nxellipsometry-entry-instrument-detector-detector-type-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/fixed_revolution-field ` :ref:`#nxellipsometry-entry-instrument-detector-fixed-revolution-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/integration_time-field ` :ref:`#nxellipsometry-entry-instrument-detector-integration-time-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/other_detector-field ` :ref:`#nxellipsometry-entry-instrument-detector-other-detector-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/revolution-field ` :ref:`#nxellipsometry-entry-instrument-detector-revolution-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/rotating_element-field ` :ref:`#nxellipsometry-entry-instrument-detector-rotating-element-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/DETECTOR/variable_revolution-field ` :ref:`#nxellipsometry-entry-instrument-detector-variable-revolution-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/ellipsometry_type-field ` :ref:`#nxellipsometry-entry-instrument-ellipsometry-type-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/focussing_probes-field ` :ref:`#nxellipsometry-entry-instrument-focussing-probes-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/light_source-field ` :ref:`#nxellipsometry-entry-instrument-light-source-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/model-field ` :ref:`#nxellipsometry-entry-instrument-model-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/model@version-attribute ` :ref:`#nxellipsometry-entry-instrument-model-version-attribute ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/other_light_source-field ` :ref:`#nxellipsometry-entry-instrument-other-light-source-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/software-field ` :ref:`#nxellipsometry-entry-instrument-software-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/software@url-attribute ` :ref:`#nxellipsometry-entry-instrument-software-url-attribute ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/software@version-attribute ` :ref:`#nxellipsometry-entry-instrument-software-version-attribute ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/stage-group ` :ref:`#nxellipsometry-entry-instrument-stage-group ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/stage/description-field ` :ref:`#nxellipsometry-entry-instrument-stage-description-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/stage/TRANSFORMATIONS-group ` :ref:`#nxellipsometry-entry-instrument-stage-transformations-group ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/stage/TRANSFORMATIONS/alternative-field ` :ref:`#nxellipsometry-entry-instrument-stage-transformations-alternative-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window-group ` :ref:`#nxellipsometry-entry-instrument-window-group ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/material-field ` :ref:`#nxellipsometry-entry-instrument-window-material-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/orientation_angle-field ` :ref:`#nxellipsometry-entry-instrument-window-orientation-angle-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data-group ` :ref:`#nxellipsometry-entry-instrument-window-reference-data-group ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/data-field ` :ref:`#nxellipsometry-entry-instrument-window-reference-data-data-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/reference_sample-field ` :ref:`#nxellipsometry-entry-instrument-window-reference-data-reference-sample-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/reference_data/reference_wavelength-field ` :ref:`#nxellipsometry-entry-instrument-window-reference-data-reference-wavelength-field ` :ref:`/NXellipsometry/ENTRY/INSTRUMENT/window/thickness-field ` :ref:`#nxellipsometry-entry-instrument-window-thickness-field ` :ref:`/NXellipsometry/ENTRY/operator-group ` :ref:`#nxellipsometry-entry-operator-group ` :ref:`/NXellipsometry/ENTRY/operator/address-field ` :ref:`#nxellipsometry-entry-operator-address-field ` :ref:`/NXellipsometry/ENTRY/operator/affiliation-field ` :ref:`#nxellipsometry-entry-operator-affiliation-field ` :ref:`/NXellipsometry/ENTRY/operator/email-field ` :ref:`#nxellipsometry-entry-operator-email-field ` :ref:`/NXellipsometry/ENTRY/operator/name-field ` :ref:`#nxellipsometry-entry-operator-name-field ` :ref:`/NXellipsometry/ENTRY/operator/orcid-field ` :ref:`#nxellipsometry-entry-operator-orcid-field ` :ref:`/NXellipsometry/ENTRY/operator/telephone_number-field ` :ref:`#nxellipsometry-entry-operator-telephone-number-field ` :ref:`/NXellipsometry/ENTRY/plot-group ` :ref:`#nxellipsometry-entry-plot-group ` :ref:`/NXellipsometry/ENTRY/plot@axes-attribute ` :ref:`#nxellipsometry-entry-plot-axes-attribute ` :ref:`/NXellipsometry/ENTRY/program-field ` :ref:`#nxellipsometry-entry-program-field ` :ref:`/NXellipsometry/ENTRY/program@url-attribute ` :ref:`#nxellipsometry-entry-program-url-attribute ` :ref:`/NXellipsometry/ENTRY/program@version-attribute ` :ref:`#nxellipsometry-entry-program-version-attribute ` :ref:`/NXellipsometry/ENTRY/SAMPLE-group ` :ref:`#nxellipsometry-entry-sample-group ` :ref:`/NXellipsometry/ENTRY/SAMPLE/atom_types-field ` :ref:`#nxellipsometry-entry-sample-atom-types-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/data_identifier-field ` :ref:`#nxellipsometry-entry-sample-data-identifier-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/data_type-field ` :ref:`#nxellipsometry-entry-sample-data-type-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/environment_conditions-field ` :ref:`#nxellipsometry-entry-sample-environment-conditions-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/layer_structure-field ` :ref:`#nxellipsometry-entry-sample-layer-structure-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/measured_data-field ` :ref:`#nxellipsometry-entry-sample-measured-data-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/medium-field ` :ref:`#nxellipsometry-entry-sample-medium-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/medium_refractive_indices-field ` :ref:`#nxellipsometry-entry-sample-medium-refractive-indices-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/number_of_runs-field ` :ref:`#nxellipsometry-entry-sample-number-of-runs-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/optical_excitation-group ` :ref:`#nxellipsometry-entry-sample-optical-excitation-group ` :ref:`/NXellipsometry/ENTRY/SAMPLE/optical_excitation/broadening-field ` :ref:`#nxellipsometry-entry-sample-optical-excitation-broadening-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/optical_excitation/excitation_duration-group ` :ref:`#nxellipsometry-entry-sample-optical-excitation-excitation-duration-group ` :ref:`/NXellipsometry/ENTRY/SAMPLE/optical_excitation/excitation_power-field ` :ref:`#nxellipsometry-entry-sample-optical-excitation-excitation-power-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/optical_excitation/excitation_source-field ` :ref:`#nxellipsometry-entry-sample-optical-excitation-excitation-source-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/optical_excitation/excitation_type-field ` :ref:`#nxellipsometry-entry-sample-optical-excitation-excitation-type-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/optical_excitation/excitation_wavelength-field ` :ref:`#nxellipsometry-entry-sample-optical-excitation-excitation-wavelength-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/optical_excitation/pulse_energy-field ` :ref:`#nxellipsometry-entry-sample-optical-excitation-pulse-energy-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/optical_excitation/pulse_length-field ` :ref:`#nxellipsometry-entry-sample-optical-excitation-pulse-length-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/optical_excitation/repetition_rate-field ` :ref:`#nxellipsometry-entry-sample-optical-excitation-repetition-rate-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/pH-field ` :ref:`#nxellipsometry-entry-sample-ph-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/preparation_date-field ` :ref:`#nxellipsometry-entry-sample-preparation-date-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/pressure-field ` :ref:`#nxellipsometry-entry-sample-pressure-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/sample_history-field ` :ref:`#nxellipsometry-entry-sample-sample-history-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/sample_name-field ` :ref:`#nxellipsometry-entry-sample-sample-name-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/temperature-field ` :ref:`#nxellipsometry-entry-sample-temperature-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/time_points-field ` :ref:`#nxellipsometry-entry-sample-time-points-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/uncertainty-field ` :ref:`#nxellipsometry-entry-sample-uncertainty-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/varied_parameters-field ` :ref:`#nxellipsometry-entry-sample-varied-parameters-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/voltage-field ` :ref:`#nxellipsometry-entry-sample-voltage-field ` :ref:`/NXellipsometry/ENTRY/SAMPLE/wavelength-field ` :ref:`#nxellipsometry-entry-sample-wavelength-field ` :ref:`/NXellipsometry/ENTRY/start_time-field ` :ref:`#nxellipsometry-entry-start-time-field ` ============================================================================================================================================================================================================== ============================================================================================================================================================================================================== **NXDL Source**: https://github.com/FAIRmat-Experimental/nexus_definitions/tree/fairmat/applications/NXellipsometry.nxdl.xml