NXfib¶
Status:
base class, extends NXobject
Description:
Set of devices adding focused-ion beam capabilities to an instrument.
Symbols:
No symbol table
- Groups cited:
NXaperture, NXlens_em, NXsource, NXtransformation
Structure:
name: (optional) NX_CHAR
Given name.
model: (optional) NX_CHAR
Given brand or model name by the manufacturer.
serial_number: (optional) NX_CHAR
Given hardware name/serial number or hash identifier issued by the manufacturer.
manufacturer_name: (optional) NX_CHAR
Given name of the manufacturer.
description: (optional) NX_CHAR
Ideally a reference to persistent documentation which specifies further details for the device. If this is not available, add a free- text description to deliver further details about the focused-ion unit.
ion_gun: (optional) NXsource
ion_source: (optional) NX_CHAR
The type of source which creates the ion beam.
Any of these values:
liquid-metal
|plasma
|gas-field
ionized_species: (optional) NX_CHAR
Which ionized elements or molecules are ionized to form the beam which is used to probe or sputter the specimen. Examples are gallium, helium, neon, argon, krypton, or xenon, O2+.
brightness: (optional) NX_FLOAT {units=NX_ANY}
Average/nominal (DISCUSS FURTHER WITH COLLEAGUES) brightness of the ion beam (at which location?).
flux: (optional) NX_FLOAT {units=NX_FLUX}
Ion flux
current: (optional) NX_FLOAT {units=NX_CURRENT}
Charge current
voltage: (optional) NX_FLOAT {units=NX_VOLTAGE}
Ion acceleration voltage upon source exit and entering the vacuum flight path.
ion_energy_profile: (optional) NX_NUMBER {units=NX_ENERGY}
NEEDS FURTHER DISCUSSION WITH COLLEAGUES HOW THIS SHOULD BE DEFINED.
TRANSFORMATION: (optional) NXtransformation
A right-handed Cartesian coordinate system is used whose positive z-axis points in the direction of the ion beam, i.e. towards the sample. For modelling ion milling it is relevant to document the illumination vector. NXtransformations offers a place to store how the ion gun coordinate system has to be rotated to align its positive z-axis with the positive z-axis of e.g. the electron beam and ion beam respectively.
LENS_EM: (optional) NXlens_em
APERTURE: (optional) NXaperture
Hypertext Anchors¶
Table of hypertext anchors for all groups, fields, attributes, and links defined in this class.
documentation (reST source) anchor |
web page (HTML) anchor |
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