NXfib¶
Status:
base class, extends NXobject
Description:
Draft of a base class for describing focused-ion beam capabilities of an instrument. The class is designed to be used as an additional component of e.g. an electron microscope to describe sample/specimen preparation and the collecting of data and metadata for (scanning) electron microscope/focused-ion beam, (S)EM/FIB instruments.
Symbols:
No symbol table
- Groups cited:
NXaperture, NXlens_em, NXsource, NXtransformation
Structure:
name: (optional) NX_CHAR
Given name.
model: (optional) NX_CHAR
Given brand or model name by the manufacturer.
serial_number: (optional) NX_CHAR
Given hardware name/serial number or hash identifier issued by the manufacturer.
manufacturer_name: (optional) NX_CHAR
Given name of the manufacturer.
description: (optional) NX_CHAR
Ideally a reference to persistent documentation which specifies further details for the device. If this is not available, add a free-text description to deliver further details about the focused-ion unit.
ion_gun: (optional) NXsource
ion_source: (optional) NX_CHAR
The type of source which creates the ion beam.
Any of these values:
liquid-metal|plasma|gas-fieldionized_species: (optional) NX_CHAR
Which ionized elements or molecule are ionized to form the beam that sputters material. Examples a gallium, helium, neon, argon, krypton, or xenon, O2+.
brightness: (optional) NX_FLOAT {units=NX_ANY}
Average/nominal (discuss further with colleagues) brightness of the ion beam (at which location?).
flux: (optional) NX_FLOAT {units=NX_FLUX}
Ion flux
current: (optional) NX_FLOAT {units=NX_CURRENT}
Charge current
voltage: (optional) NX_FLOAT {units=NX_VOLTAGE}
Ion acceleration voltage upon source exit and entering the vacuum flight path.
ion_energy_profile: (optional) NX_NUMBER {units=NX_ENERGY}
Needs further discussion with colleagues how this should be defined.
TRANSFORMATION: (optional) NXtransformation
A right-handed Cartesian coordinate system is used whose positive z-axis points in the direction of the ion beam, i.e. towards the sample. For modelling ion milling it is relevant to document the illumination vector. NXtransformations offers a place to store how the ion gun coordinate system has to be rotated to align its positive z-axis with the positive z-axis of e.g. the electron beam and ion beam respectively.
LENS_EM: (optional) NXlens_em
APERTURE: (optional) NXaperture
Hypertext Anchors¶
Table of hypertext anchors for all groups, fields, attributes, and links defined in this class.
documentation (reST source) anchor |
web page (HTML) anchor |
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